{"data":{"id":"us/40-cfr-63.7180","jurisdiction":"us","citation":"40 CFR 63.7180","heading":"What is the purpose of this subpart?","body":"This subpart establishes national emission standards for hazardous air pollutants (NESHAP) for semiconductor manufacturing facilities. This subpart also establishes requirements to demonstrate initial and continuous compliance with the emission standards.","path":["Title 40—Protection of Environment","CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY","SUBCHAPTER C—AIR PROGRAMS","PART 63—NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR SOURCE CATEGORIES","Subpart BBBBB—National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing"],"source_url":"https://www.ecfr.gov/api/versioner/v1/full/2026-08-25/title-40.xml","current_through":"2026-08-25","vintage":"","retrieved_at":"2026-08-27T02:26:04Z","sha256":"7187e768e455455f7d61be56afe9a0d2ded085ea985a1c502340df003e12ee98","source_id":"us-cfr","stale":true,"prev":"us/40-cfr-table-11-to-subpart-aaaaa-of-part-63","next":"us/40-cfr-63.7181"},"notice":"GroundRules: Original legal text. Not legal advice."}