{"data":{"id":"us/40-cfr-table-i-1-to-subpart-i-of-part-98","jurisdiction":"us","citation":"40 CFR Table I-1 to Subpart I of Part 98","heading":"Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination","body":"Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination\nProduct type Emission factors EFi\nCF4 C2 F6 CHF3 c-C4 F8 C3 F8 NF3 SF6 N2 O\nSemiconductors (kg/m2) 0.9 1.0 0.04 NA 0.05 0.04 0.20 NA\nLCD (g/m2) 0.65 NA 0.0024 0.00 NA 1.29 4.14 17.06\nMEMS (kg/m2) 0.015 NA NA 0.076 NA NA 1.86 NA\nNotes: NA denotes not applicable based on currently available information.","path":["Title 40—Protection of Environment","CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY","SUBCHAPTER C—AIR PROGRAMS","PART 98—MANDATORY GREENHOUSE GAS REPORTING","Subpart I—Electronics Manufacturing"],"source_url":"https://www.ecfr.gov/api/versioner/v1/full/2026-08-25/title-40.xml","current_through":"2026-08-25","vintage":"","retrieved_at":"2026-08-27T02:26:04Z","sha256":"49927fb886195bc1794edbedb4534dd6f491b796ca902e7bcef64ad2624a073b","source_id":"us-cfr","stale":true,"prev":"us/40-cfr-98.98","next":"us/40-cfr-table-i-2-to-subpart-i-of-part-98"},"notice":"GroundRules: Original legal text. Not legal advice."}