{"data":{"id":"us/40-cfr-table-i-12-to-subpart-i-of-part-98","jurisdiction":"us","citation":"40 CFR Table I-12 to Subpart I of Part 98","heading":"Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method","body":"Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method\n[300 mm and 450 mm Wafers]\nAll processes Process gas i\nCF4 C2 F6 CHF3 CH2 F2 CH3 F C3 F8 C3 F8 Remote C4 F8 NF3 NF3 Remote SF6 C4 F6 C5 F8 C4 F8 O\n1-Ui 0.65 0.80 0.37 0.20 0.30 0.30 0.063 0.183 0.19 0.018 0.30 0.15 0.100 NA\nBCF4 NA 0.21 0.076 0.060 0.029 0.21 NA 0.045 0.040 0.037 0.033 0.059 0.109 NA\nBC2 F6 0.058 NA 0.058 0.043 0.0093 0.18 NA 0.027 0.0204 NA 0.041 0.062 0.083 NA\nBC4 F6 0.0083 NA 0.01219 NA 0.001 NA NA 0.008 NA NA NA NA NA NA\nBC4 F8 0.0046 NA 0.00272 0.054 0.007 NA NA NA NA NA NA 0.0051 NA NA\nBC3 F8 NA NA NA NA NA NA NA NA NA NA NA NA 0.00012 NA\nBCH2 F2 0.005 NA 0.0024 NA 0.0033 NA NA 0.0021 0.00034 0.00088 0.000020 0.000030 NA NA\nBCH3 F 0.0061 NA 0.027 0.0036 NA 0.0007 NA 0.0063 0.0036 0.0028 0.0082 0.00065 NA NA\nBCHF3 0.012 NA NA 0.057 0.016 0.012 NA 0.028 0.0106 0.000059 0.0039 0.017 0.0069 NA\nBF2 NA NA NA NA NA NA NA NA NA 0.50 NA NA NA NA","path":["Title 40—Protection of Environment","CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY","SUBCHAPTER C—AIR PROGRAMS","PART 98—MANDATORY GREENHOUSE GAS REPORTING","Subpart I—Electronics Manufacturing"],"source_url":"https://www.ecfr.gov/api/versioner/v1/full/2026-08-25/title-40.xml","current_through":"2026-08-25","vintage":"","retrieved_at":"2026-08-27T02:26:04Z","sha256":"3bcfbf0b6eae4e35aee6a431568895a56e6ca7f4e64c7a1e4059c7ff18914906","source_id":"us-cfr","stale":true,"prev":"us/40-cfr-table-i-11-to-subpart-i-of-part-98","next":"us/40-cfr-table-i-13-to-subpart-i-of-part-98"},"notice":"GroundRules: Original legal text. Not legal advice."}