{"data":{"id":"us/40-cfr-table-i-16-to-subpart-i-of-part-98","jurisdiction":"us","citation":"40 CFR Table I-16 to Subpart I of Part 98","heading":"Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing","body":"Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing\nManufacturing type/process type/gas Default DRE (%)\nMEMS, LCDs, and PV Manufacturing 60\nSemiconductor Manufacturing:\nCF4 87\nCH3 F 98\nCHF3 97\nCH2 F2 98\nC4 F8 93\nC4 F8 O 93\nC5 F8 97\nC4 F6 95\nC3 F8 98\nC2 HF5 97\nC2 F6 98\nSF6 95\nNF3 96\nAll other carbon-based fluorinated GHGs used in Semiconductor Manufacturing 60\nN2 O Processes\nCVD and all other N2 O-using processes 60","path":["Title 40—Protection of Environment","CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY","SUBCHAPTER C—AIR PROGRAMS","PART 98—MANDATORY GREENHOUSE GAS REPORTING","Subpart I—Electronics Manufacturing"],"source_url":"https://www.ecfr.gov/api/versioner/v1/full/2026-08-25/title-40.xml","current_through":"2026-08-25","vintage":"","retrieved_at":"2026-08-27T02:26:04Z","sha256":"d193b1c2fc07005985e9729cabb4f6eea01ecef154bcef5c119dcec3b051d3a3","source_id":"us-cfr","stale":true,"prev":"us/40-cfr-table-i-15-to-subpart-i-of-part-98","next":"us/40-cfr-table-i-17-to-subpart-i-of-part-98"},"notice":"GroundRules: Original legal text. Not legal advice."}