{"data":{"id":"us/40-cfr-table-i-18-to-subpart-i-of-part-98","jurisdiction":"us","citation":"40 CFR Table I-18 to Subpart I of Part 98","heading":"Table I-18 to Subpart I of Part 98—Default Factors for Gamma (gi,p and gk,i,p) for Semiconductor Manufacturing and for MEMS and PV Manufacturing Under Certain Conditions * for Use With the Stack Testing Method","body":"Table I-18 to Subpart I of Part 98—Default Factors for Gamma (gi,p and gk,i,p) for Semiconductor Manufacturing and for MEMS and PV Manufacturing Under Certain Conditions * for Use With the Stack Testing Method\nProcess type In-situ thermal or in-situ plasma cleaning Remote plasma cleaning\nGas CF4 C2 F6 c-C4 F8 NF3 SF6 C3 F8 CF4 NF3\nIf manufacturing wafer sizes ≤200 mm AND manufacturing 300 mm (or greater) wafer sizes\ngi 13 9.3 4.7 14 11 NA NA 5.7\ngCF4,i NA 23 6.7 63 8.7 NA NA 58\ngC2F6,i NA NA NA NA 3.4 NA NA NA\ngCHF3,i NA NA NA NA NA NA NA 0.24\ngCH2F2,i NA NA NA NA NA NA NA 111\ngCH3F,i NA NA NA NA NA NA NA 33\nIf manufacturing ≤200 mm OR manufacturing 300 mm (or greater) wafer sizes\ngi (≤ 200 mm wafer size) 13 9.3 4.7 2.9 11 NA NA 1.4\ngCF4,i (≤200 mm wafer size) NA 23 6.7 110 8.7 NA NA 36\ngC2F6,i (≤200 mm wafer size) NA NA NA NA 3.4 NA NA NA\ngi (300 mm wafer size) NA NA NA 26 NA NA NA 10\ngCF4,i (300 mm wafer size) NA NA NA 17 NA NA NA 80\ngC2F6,i (300 mm wafer size) NA NA NA NA NA NA NA NA\ngCHF3,i (300 mm wafer size) NA NA NA NA NA NA NA 0.24\ngCH2F2,i (300 mm wafer size) NA NA NA NA NA NA NA 111\ngCH3F,i (300 mm wafer size) NA NA NA NA NA NA NA 33\n* If you manufacture MEMS or PVs and use semiconductor tools and processes, you may use the corresponding g in this table. For all other tools and processes, a default g of 10 must be used.","path":["Title 40—Protection of Environment","CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY","SUBCHAPTER C—AIR PROGRAMS","PART 98—MANDATORY GREENHOUSE GAS REPORTING","Subpart I—Electronics Manufacturing"],"source_url":"https://www.ecfr.gov/api/versioner/v1/full/2026-08-25/title-40.xml","current_through":"2026-08-25","vintage":"","retrieved_at":"2026-08-27T02:26:04Z","sha256":"dee389b26ece71589732d6ed01d8c5ee06bc076c110e2f4db8aad389835746c0","source_id":"us-cfr","stale":true,"prev":"us/40-cfr-table-i-17-to-subpart-i-of-part-98","next":"us/40-cfr-table-i-19-to-subpart-i-of-part-98"},"notice":"GroundRules: Original legal text. Not legal advice."}