{"data":{"id":"us/40-cfr-table-i-6-to-subpart-i-of-part-98","jurisdiction":"us","citation":"40 CFR Table I-6 to Subpart I of Part 98","heading":"Table I-6 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing","body":"Process type factors Process gas i\nCF4 C2 F6 CHF3 CH2 F2 C3 F8 c− C4 F8 NF3 Remote NF3 SF6\nEtch 1-Ui 0.6 NA 0.2 NA NA 0.1 NA NA 0.3\nEtch BCF4 NA NA 0.07 NA NA 0.009 NA NA NA\nEtch BCHF3 NA NA NA NA NA 0.02 NA NA NA\nEtch BC2 F4 NA NA 0.05 NA NA NA NA NA NA\nCVD Chamber Cleaning 1-Ui NA NA NA NA NA NA 0.03 0.3 0.9\nNotes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.","path":["Title 40—Protection of Environment","CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY","SUBCHAPTER C—AIR PROGRAMS","PART 98—MANDATORY GREENHOUSE GAS REPORTING","Subpart I—Electronics Manufacturing"],"source_url":"https://www.ecfr.gov/api/versioner/v1/full/2026-08-25/title-40.xml","current_through":"2026-08-25","vintage":"","retrieved_at":"2026-08-27T02:26:04Z","sha256":"1450135d9a443c1bfb32decbf22cb95f8eb479feae6021f332ac42fe8c7ac86d","source_id":"us-cfr","stale":true,"prev":"us/40-cfr-table-i-5-to-subpart-i-of-part-98","next":"us/40-cfr-table-i-7-to-subpart-i-of-part-98"},"notice":"GroundRules: Original legal text. Not legal advice."}