N.Y.C. Admin. Code § FC 2703: Section FC 2703: General Safety Provisions

2703.1 Emergency control station.

An emergency control station shall be maintained in accordance with FC 2703.1.1 through 2703.1.3.

2703.1.1 Location.

The emergency control station shall be located on the premises at an approved location outside of the fabrication area.

2703.1.2 Staffing.

Trained personnel shall continuously staff the emergency control station.

2703.1.3 Signals.

The emergency control station shall monitor signals from emergency equipment and alarm and detection systems, including the following systems, whether required by this code or the construction codes or voluntarily installed:

1. Sprinkler system alarm and monitoring systems.

2. Manual fire alarm systems.

3. Emergency alarm systems.

4. Continuous-gas detection systems.

5. Smoke detection systems.

6. Emergency power systems.

7. Automatic detection and alarm systems for pyrophoric liquids and Class 3 water-reactive liquids required by FC 2705.2.3.4.

8. Exhaust ventilation flow alarm devices for pyrophoric liquids and Class 3 water-reactive liquids cabinet exhaust ventilation systems required by FC 2705.2.3.4.

2703.2 Devices, equipment and systems.

Devices, equipment and systems including, containers, piping, tubing, valves and fittings shall comply with the requirements of this section, FC 5003.2, and other applicable provisions of this code, and the construction codes, including the Building Code and the Mechanical Code.

2703.2.1 Additional regulations for HPM supply piping and tubing.

The requirements set forth in FC 5003.2.2.2 shall apply to supply piping and tubing for HPM gases and liquids. Supply piping and tubing for HPM gases and liquids having a health-hazard ranking of 3 or 4 shall be welded throughout, except for connections located within a ventilated enclosure if the material is a gas, or an approved method of drainage or containment is provided for connections if the material is a liquid.

2703.3 Design and installation requirements.

Semiconductor fabrication facilities shall be designed and installed in accordance with FC 2703.3.1 through 2703.3.9.

2703.3.1 Fabrication areas.

Design, installation and location of fabrication areas shall comply with the requirements of the construction codes, including the Building Code.

2703.3.2 Pass-throughs in exit access corridors.

Pass-throughs in exit access corridors shall be constructed in accordance with the construction codes, including the Building Code.

2703.3.3 Liquid storage rooms.

Liquid storage rooms shall comply with the requirements of FC Chapter 57 and the construction codes, including the Building Code.

2703.3.4 HPM rooms.

HPM rooms shall comply with the requirements of the construction codes, including the Building Code.

2703.3.5 Gas cabinets.

Gas cabinets shall comply with the requirements of FC 5003.8.6.

2703.3.6 Exhausted enclosures.

Exhausted enclosures shall comply with the requirements of FC 5003.8.5.

2703.3.7 Gas rooms.

Gas rooms shall comply with the requirements of FC 5003.8.4.

2703.3.8 Service corridors.

Service corridors shall comply with the requirements of FC 2705.3.3 and the Building Code.

2703.3.9 Cabinets containing pyrophoric liquids or water-reactive Class 3 liquids.

Cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids in containers or in amounts greater than 1/2 gallon (2 L) shall comply with FC 2705.2.3.4.

2703.4 Emergency plan.

An emergency preparedness plan shall be prepared in accordance with FC Chapter 4.

2703.5 Maintenance of devices, equipment, systems and processes.

Maintenance of devices, equipment, systems and processes shall comply with the requirements of FC 5003.2.6.

2703.6 Reserved.

2703.7 Electrical wiring and equipment.

Electrical wiring and equipment in HPM facilities shall comply with the requirements of FC 2703.7.1 through 2703.7.3.

2703.7.1 Fabrication areas.

Electrical wiring and equipment in fabrication areas shall comply with the requirements of the Building Code and Electrical Code.

2703.7.2 Workstations.

Electrical equipment and devices within 5 feet (1524 mm) of workstations in which flammable or pyrophoric gases or flammable liquids are used shall comply with the requirements of the Electrical Code for Class I, Division 2 hazardous locations. Workstations shall not be energized without adequate exhaust ventilation in accordance with FC 2703.14.

Exception: Class I, Division 2 hazardous electrical equipment is not required when the air removal from the workstation or dilution will prevent the accumulation of flammable vapors and fumes on a continuous basis.

2703.7.3 Hazardous production material (HPM) rooms, gas rooms and liquid storage rooms.

Electrical wiring and equipment in HPM rooms, gas rooms and liquid storage rooms shall comply with the requirements of the Electrical Code.

2703.8 Reserved.

2703.9 Reserved.

2703.10 Sprinkler system.

A sprinkler system shall be provided in accordance with FC 2703.10.1 through 2703.10.5, FC Chapter 9 and the Building Code.

2703.10.1 Workstations and tools.

The design of the sprinkler system in the area shall take into consideration the spray pattern and the effect on the equipment.

2703.10.1.1 Combustible workstations.

A sprinkler head shall be installed within each branch exhaust connection or individual plenums of workstations of combustible construction. The sprinkler head in the exhaust connection or plenum shall be located not more than 2 feet (610 mm) from the point of the duct connection or the connection to the plenum. When necessary to prevent corrosion, the sprinkler head and connecting piping in the duct shall be coated with approved or listed corrosion-resistant materials. The sprinkler head shall be accessible for periodic inspection in accordance with FC Chapter 9.

Exceptions:

1. Alternative fire extinguishing systems shall be allowed where approved. Activation of such systems shall deactivate the related processing equipment.

2. Process equipment that operates at temperatures exceeding 932°F (500°C) and has automatic shutdown capabilities that will interrupt HPM flow for hazardous materials.

3. Exhaust ducts 10 inches (254 mm) or less in diameter from flammable gas storage cabinets that are part of a workstation.

4. Ducts listed or approved for use without internal sprinkler protection.

2703.10.1.2 Combustible tools.

Where the horizontal surface of a combustible tool is obstructed from ceiling sprinkler discharge, sprinkler protection that covers the horizontal surface of the tool shall be provided.

Exceptions:

1. A gaseous fire extinguishing local surface application system shall be allowed as an alternative to sprinklers when approved. Gaseous fire extinguishing systems shall be actuated by infrared (IR) or ultraviolet/infrared (UVIR) optical detectors.

2. Tools constructed of materials that are listed as Class 1 or Class 2 in accordance with UL 2360 or approved for use without internal fire extinguishing system protection.

2703.10.2 Gas cabinets and exhausted enclosures.

A sprinkler system shall be provided in gas cabinets and exhausted enclosures containing HPM compressed gases.

Exception: Gas cabinets located in a HPM room other than those cabinets containing pyrophoric gases.

2703.10.3 Pass-throughs in exit access corridors.

Pass-throughs in exit access corridors shall be protected throughout by a sprinkler system.

2703.10.4 Exhaust ducts for HPM.

A sprinkler system shall be provided in exhaust ducts conveying gases, vapors, fumes, mists or dusts generated from HPM in accordance with this section and the Mechanical Code and the Building Code.

2703.10.4.1 Metallic and noncombustible nonmetallic exhaust ducts.

A sprinkler system shall be provided in metallic and noncombustible nonmetallic exhaust ducts when the following conditions apply:

1. The largest cross-sectional diameter is equal to or greater than 10 inches (254 mm).

2. The ducts are within the building.

3. The ducts are conveying flammable gases, vapors or fumes.

2703.10.4.2 Combustible nonmetallic exhaust ducts.

A sprinkler system shall be provided in combustible nonmetallic exhaust ducts when the largest cross-sectional diameter of the duct is equal to or greater than 10 inches (254 mm).

Exceptions:

1. Ducts listed or approved for applications without sprinkler system protection.

2. Ducts not more than 12 feet (3658 mm) in length installed below ceiling level.

2703.10.4.3 Exhaust connections and plenums of combustible workstations.

Fire extinguishing system protection for exhaust connections and plenums of combustible workstations shall comply with the requirements of FC 2703.10.1.1.

2703.10.4.4 Exhaust duct sprinkler system requirements.

Sprinkler systems installed in exhaust duct systems shall be hydraulically designed to provide 1/2 gallon per minute (gpm) (1.9 L/min) over an area derived by multiplying the distance between the sprinklers in a horizontal duct by the width of the duct. Minimum discharge shall be 20 gpm (76 L/min) per sprinkler from the five hydraulically most remote sprinklers.

2703.10.4.4.1 Sprinkler head locations.

Sprinkler heads shall be installed at 12-foot (3658 mm) intervals in horizontal ducts and at changes in direction. In vertical runs, sprinkler heads shall be installed at the top and at alternate floor levels.

2703.10.4.4.2 Control valve.

A separate indicating control valve shall be provided for sprinkler heads installed in exhaust ducts.

2703.10.4.4.3 Drainage.

Drainage shall be provided to remove sprinkler water discharged in exhaust ducts.

2703.10.4.4.4 Corrosive atmospheres.

Where corrosive atmospheres exist, exhaust duct sprinkler heads and pipe fittings shall be manufactured of corrosion-resistant materials or coated with approved materials.

2703.10.4.4.5 Maintenance and inspection.

Sprinkler heads in exhaust ducts shall be accessible for inspection and maintenance and shall be inspected and maintained on not less than an annual basis.

2703.10.5 Sprinkler alarms and supervision.

Sprinkler systems shall be electrically supervised and provided with alarms in accordance with the construction codes, including the Building Code. Sprinkler system alarm and supervisory signals shall be transmitted to the emergency control station.

2703.11 Manual fire alarm system.

A manual fire alarm system shall be installed throughout buildings containing a Group H-5 occupancy. Activation of the alarm system shall initiate a local alarm and transmit a signal to the emergency control station. Manual fire alarm systems shall be designed and installed in accordance with the construction codes, including the Building Code.

2703.12 Emergency alarm system.

Emergency alarm systems shall be provided in accordance with this section, FC 5004.9 and FC 5005.4.4. The maximum allowable quantity per control area provisions of FC 5004.1 shall not apply to emergency alarm systems required for HPM.

2703.12.1 Where required.

Emergency alarm systems shall be provided in the areas indicated in FC 2703.12.1.1 through 2703.12.1.3.

2703.12.1.1 Service corridors.

An approved emergency alarm system shall be provided in service corridors, with at least one alarm device in the service corridor.

2703.12.1.2 Exit access corridors and exit enclosures.

Emergency alarms for exit access corridors and exit enclosures shall comply with the requirements of FC 5005.4.4.

2703.12.1.3 Liquid storage rooms, HPM rooms and gas rooms.

Emergency alarms for liquid storage rooms, HPM rooms and gas rooms shall comply with the requirements of FC 5004.9.

2703.12.2 Alarm-initiating devices.

An approved emergency telephone system, local alarm manual pull stations, or other approved alarm-initiating devices are allowed to be used as emergency alarm-initiating devices.

2703.12.3 Alarm signals.

Activation of the emergency alarm system shall sound a local alarm and transmit a signal to the emergency control station.

2703.13 Continuous gas detection systems.

A continuous gas detection system shall be provided for HPM gases when the physiological warning properties of the gas are at a higher level than the accepted permissible exposure limit (PEL) for the gas and for flammable gases in accordance with the construction codes, including the Building Code.

2703.14 Exhaust ventilation systems for HPM.

Exhaust ventilation systems and materials for exhaust ducts utilized for the exhaust of HPM shall comply with the requirements of this section, other applicable provisions of this code, the construction codes, including the Building Code and the Mechanical Code.

2703.14.1 Where required.

Exhaust ventilation systems shall be provided in the following locations in accordance with this section and the construction codes, including the Building Code:

1. Fabrication areas: Exhaust ventilation for fabrication areas shall comply with the requirements of the construction codes, including the Building Code. Additional manual control switches shall be provided as may be required by the commissioner.

2. Workstations: A ventilation system shall be provided to capture and exhaust fumes and vapors at workstations.

3. Liquid storage rooms: Exhaust ventilation for liquid storage rooms shall comply with the requirements of FC 5004.3.1 and the construction codes, including the Building Code and Mechanical Code.

4. HPM rooms: Exhaust ventilation for HPM rooms shall comply with the requirements of FC 5004.3.1 and the construction codes, including the Building Code and the Mechanical Code.

5. Gas cabinets: Exhaust ventilation for gas cabinets shall comply with the requirements of FC 5003.8.6.2. The gas cabinet ventilation system is allowed to connect to a workstation ventilation system. Exhaust ventilation for gas cabinets containing highly toxic or toxic gases shall additionally comply with the requirements of FC Chapter 60.

6. Exhausted enclosures: Exhaust ventilation for exhausted enclosures shall comply with the requirements of FC 5003.8.5.2. Exhaust ventilation for exhausted enclosures containing highly toxic or toxic gases shall additionally comply with the requirements of FC Chapter 60.

7. Gas rooms: Exhaust ventilation for gas rooms shall comply with the requirements of FC 5003.8.4.2. Exhaust ventilation for gas rooms containing highly toxic or toxic gases shall additionally comply with the requirements of FC Chapter 60.

8. Cabinets containing pyrophoric liquids or Class 3 water-reactive liquids: Exhaust ventilation for cabinets in fabrication areas containing pyrophoric liquids or Class 3 water-reactive liquids shall be as required in FC 2705.2.3.4.

2703.14.2 Penetrations.

Exhaust ducts penetrating fire barrier assemblies shall be contained in a shaft of equivalent fire-resistance-rated construction. Exhaust ducts shall not penetrate fire walls. Fire dampers shall not be installed in exhaust ducts.

2703.14.3 Treatment systems.

Treatment systems for highly toxic and toxic gases shall comply with the requirements of FC Chapter 60.

2703.15 Emergency power system.

An emergency power system shall be provided in Group H-5 occupancies where required by the construction codes, including the Building Code. The emergency power system shall be designed to supply power automatically to required electrical systems when the normal supply system is interrupted.

2703.15.1 Required electrical systems.

Emergency power shall be provided for electrically operated equipment and connected control circuits as required by Chapter 4 of the Building Code or this code.

2703.16 Sub-atmospheric pressure gas systems.

Sub-atmospheric pressure gas systems (SAGS) shall be designed, installed, operated and maintained in accordance with NFPA 318.