N.Y.C. Admin. Code § FC 2704: Section FC 2704: Storage

2704.1 General.

Hazardous materials shall be stored in semiconductor fabrication facilities in accordance with this section and the provisions of other applicable chapters of this code.

2704.2 Fabrication areas.

Hazardous materials shall be stored in accordance with FC 2704.2.1 through 2704.2.2.1.

2704.2.1 Location of HPM storage in fabrication areas.

Storage of HPM in fabrication areas shall be within approved or listed storage cabinets, gas cabinets or within a workstation as follows:

1. Flammable and combustible liquid storage cabinets shall comply with the requirements of FC Chapter 57.

2. Hazardous materials storage cabinets shall comply with the requirements of FC 5003.8.7.

3. Gas cabinets shall comply with the requirements of FC 5003.8.6. Gas cabinets for highly toxic or toxic gases shall additionally comply with the requirements of FC 6004.1.2.

4. Exhausted enclosures shall comply with FC 5003.8.5. Exhausted enclosures for highly toxic or toxic gases shall also comply with FC 6004.1.3.

5. Workstations shall comply with the requirements of FC 2705.2.3.

2704.2.2 Maximum aggregate quantities in fabrication areas.

The aggregate quantities of hazardous materials stored, handled and used in a single fabrication area shall be limited as specified in this section.

Exception: Fabrication areas containing quantities of hazardous materials not exceeding the maximum allowable quantities per control area established by FC 5003.1.1, 5704.3.4 and 5704.3.5.

FC Table 2704.2.2.1 Quantity Limits for Hazardous Materials in a Single Fabrication Area in Group H-5

a

Hazard Category

Solids (pounds / square foot)

Liquids (gallons / square foot)

Gas (SCF / square foot)

Physical-Hazard Materials

Combustible dust

Note b

Not Applicable

Not Applicable

Combustible fiber

Loose

Baled

Note b Notes b, c

Not Applicable

Not Applicable

Combustible liquid

Class II

Class IIIA

Class IIIB

Combination Class I, II and IIIA

Not Applicable

0.01 0.02 Not Limited 0.04

Not Applicable

Cryogenic gas

Flammable

Oxidizing

Not Applicable

Not Applicable

Note d 1.25

Explosives

Note b

Note b

Note b

Flammable gas

Gaseous

Liquefied

Not Applicable

Not Applicable

Note d Note d

Flammable liquid

Class IA

Class IB

Class IC

Combination Class IA, IB and IC

Combination Class I, II and IIIA

Not Applicable

0.0025 0.025 0.025 0.025 0.04

Not Applicable

Flammable solid

0.001

Not Applicable

Not Applicable

Organic peroxide

Unclassified detonable

Class I

Class II

Class III

Class IV

Class V

Note b Note b 0.025 0.1 Not Limited Not Limited

Not Applicable

Not Applicable

Oxidizing gas

Gaseous

Liquefied

Combination of Gaseous and Liquefied

Not Applicable

Not Applicable

1.25 1.25 1.25

Oxidizer

Class 4

Class 3

Class 2

Class 1

Combination oxidizer Class 1, 2, 3

Note b 0.003 0.003 0.003 0.003

Note b 0.03 0.03 0.03 0.03

Not Applicable

Pyrophoric

Note b

0.00125

Notes d and e

Unstable reactive

Class 4

Class 3

Class 2

Class 1

Note b 0.025 0.1 Not Limited

Note b 0.0025 0.01 Not Limited

Note b Note b Note b Not Limited

Water reactive

Class 3

Class 2

Class 1

Note b 0.25 Not Limited

0.00125 0.025 Not Limited

Not Applicable

Health-Hazard Materials

Corrosives

Not Limited

Not Limited

Not Limited

Highly toxics

Not Limited

Not Limited

Note d

Toxics

Not Limited

Not Limited

Note d

For SI: 1 pound per square foot = 4.882 kg/m

2

, 1 gallon per square foot = 0.025 L/m

2

, 1 cubic foot = 0.02832 m

3

.

a. Hazardous materials within piping shall not be included in the calculated quantities.

b. Quantity of hazardous materials in a single fabrication area shall not exceed the maximum allowable quantities per control area in FC Tables 5003.1.1(1) and 5003.1.1(2).

c. Densely packed baled cotton that complies with the packing requirements of ISO 8115 shall not be included in this material class.

d. The aggregate quantity of flammable, pyrophoric, toxic and highly toxic gases shall not exceed 9,000 SCF.

e. The aggregate quantity of pyrophoric gases in the building shall not exceed the amounts set forth in FC Table 5003.8.2.

2704.2.2.1 Storage and use in fabrication areas.

The maximum quantities of hazardous materials stored in a single fabrication area shall not exceed the quantities set forth in FC Table 2704.2.2.1.

2704.3 Indoor storage outside of fabrication areas.

The indoor storage of hazardous materials outside of fabrication areas shall be in accordance with FC 2704.3.1 through 2704.3.3.

2704.3.1 HPM storage.

The indoor storage of HPM in quantities greater than those listed in FC 5003.1.1 and 5704.3.4 shall be in a room complying with the requirements of the construction codes, including the Building Code, 

and this code for a liquid storage room, HPM room or gas room as appropriate for the materials stored.

2704.3.2 Other hazardous materials storage.

The indoor storage of other hazardous materials shall comply with the requirements of FC 5001, 5003 and 5004 and other applicable provisions of this code.

2704.3.3 Separation of incompatible hazardous materials.

Incompatible hazardous materials in storage shall be separated from each other in accordance with FC 5003.9.8.

2704.4 Exit access corridors and exit enclosures.

Hazardous materials shall not be stored in exit access corridors or exit access enclosures.