GroundRules
40 CFR Table I-1 to Subpart I of Part 98: Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination
Where this section sits in the code
- Title 40—Protection of Environment
- CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY
- SUBCHAPTER C—AIR PROGRAMS
- PART 98—MANDATORY GREENHOUSE GAS REPORTING
- Subpart I—Electronics Manufacturing
Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination
Product type Emission factors EFi
CF4 C2 F6 CHF3 c-C4 F8 C3 F8 NF3 SF6 N2 O
Semiconductors (kg/m2) 0.9 1.0 0.04 NA 0.05 0.04 0.20 NA
LCD (g/m2) 0.65 NA 0.0024 0.00 NA 1.29 4.14 17.06
MEMS (kg/m2) 0.015 NA NA 0.076 NA NA 1.86 NA
Notes: NA denotes not applicable based on currently available information.
Collected 2026-08-27T02:26:04Z. Source file · JSON