40 CFR Table I-16 to Subpart I of Part 98: Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Manufacturing type/process type/gas Default DRE (%)

MEMS, LCDs, and PV Manufacturing 60

Semiconductor Manufacturing:

CF4 87

CH3 F 98

CHF3 97

CH2 F2 98

C4 F8 93

C4 F8 O 93

C5 F8 97

C4 F6 95

C3 F8 98

C2 HF5 97

C2 F6 98

SF6 95

NF3 96

All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing 60

N2 O Processes

CVD and all other N2 O-using processes 60