40 CFR Table I-21 to Subpart I of Part 98: Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
Where this section sits in the code
- Title 40—Protection of Environment
- CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY
- SUBCHAPTER C—AIR PROGRAMS
- PART 98—MANDATORY GREENHOUSE GAS REPORTING
- Subpart I—Electronics Manufacturing
Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
Product type Fluorinated GHGs used during manufacture
Electronics CF4, C2 F6, C3 F8, c-C4 F8, c-C4 F8 O, C4 F6, C5 F8, CHF3, CH2 F2, NF3, SF6, and fluorinated HTFs (CF3-(O-CF(CF3)-CF2)n-(O-CF2)m-O-CF3, Cn F2n+2, Cn F2n+1 (O)Cm F2m+1, Cn F2n O, (Cn F2n+1)3N).
Collected 2026-08-27T02:26:04Z. Source file · JSON