GroundRules
40 CFR Table I-7 to Subpart I of Part 98: Table I-7 To Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for PV Manufacturing
Where this section sits in the code
- Title 40—Protection of Environment
- CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY
- SUBCHAPTER C—AIR PROGRAMS
- PART 98—MANDATORY GREENHOUSE GAS REPORTING
- Subpart I—Electronics Manufacturing
Process type factors Process gas i
CF4 C2 F6 CHF3 CH2 F2 C3 F8 c− C4 F8 NF3 Remote NF3 SF6
Etch 1-Ui 0.7 0.4 0.4 NA NA 0.2 NA NA 0.4
Etch BCF4 NA 0.2 NA NA NA 0.1 NA NA NA
Etch BC2 F6 NA NA NA NA NA 0.1 NA NA NA
CVD Chamber Cleaning 1-Ui NA 0.6 NA NA 0.1 0.1 NA 0.3 0.4
CVD Chamber Cleaning BCF4 NA 0.2 NA NA 0.2 0.1 NA NA NA
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.
Collected 2026-08-27T02:26:04Z. Source file · JSON