GroundRules
40 CFR Table I-8 to Subpart I of Part 98: Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O,j) for N2O Utilization (UN2O,j)
Where this section sits in the code
- Title 40—Protection of Environment
- CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY
- SUBCHAPTER C—AIR PROGRAMS
- PART 98—MANDATORY GREENHOUSE GAS REPORTING
- Subpart I—Electronics Manufacturing
Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2 O,j) for N2 O Utilization (UN2 O,j)
Manufacturing type/process type/wafer size N2 O
Semiconductor Manufacturing:
200 mm or Less:
CVD 1-Ui 1.0
Other Manufacturing Process 1-Ui 1.0
300 mm or greater:
CVD 1-Ui 0.5
Other Manufacturing Process 1-Ui 1.0
LCD Manufacturing:
CVD Thin Film Manufacturing 1-Ui 0.63
All other N2 O Processes 1.0
Collected 2026-08-27T02:26:04Z. Source file · JSON