GroundRules
40 CFR Table I-6 to Subpart I of Part 98: Table I-6 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing
Where this section sits in the code
- Title 40—Protection of Environment
- CHAPTER I—ENVIRONMENTAL PROTECTION AGENCY
- SUBCHAPTER C—AIR PROGRAMS
- PART 98—MANDATORY GREENHOUSE GAS REPORTING
- Subpart I—Electronics Manufacturing
Process type factors Process gas i
CF4 C2 F6 CHF3 CH2 F2 C3 F8 c− C4 F8 NF3 Remote NF3 SF6
Etch 1-Ui 0.6 NA 0.2 NA NA 0.1 NA NA 0.3
Etch BCF4 NA NA 0.07 NA NA 0.009 NA NA NA
Etch BCHF3 NA NA NA NA NA 0.02 NA NA NA
Etch BC2 F4 NA NA 0.05 NA NA NA NA NA NA
CVD Chamber Cleaning 1-Ui NA NA NA NA NA NA 0.03 0.3 0.9
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.
Collected 2026-08-27T02:26:04Z. Source file · JSON